Piezo Syteme Jena

piezosystem jena has developed a new 6axis stage which offers a motion in x-, y- and z-direction of 100μm and a tilt of up to ± 5 mrad on three orthogonal axes .

Flexure hinges for the three translation axes guarantee the highest degree of parallelism over the travel range of the stage. Each axis has a built-in integrated mechanical pre-load, making the new 6axis stage very well suited for dynamic applications. The tilting part is designed for plus-minus tilting. Dynamic operation is possible because the stage is pre-loaded, and characterized by high stiffness and resonant frequency. The primary components with solid state flexure hinges are made of stainless steel. The bottom and top plates are made of black anodized aluminum.

Due to FEA-optimization of these stages you can achieve the highest dynamical per-formance and excellent guiding accuracy. This is ccomplished even with high mass loads in a compact package. Parallel motion is achieved without any play due to the mechanical design.

As an option, integrated position control systems for overcoming the effect of hysteresis are available.