INHALTE
SIOS-interferometer & vibrometer
piezosystem jena is pleased to announce the immediate availability of SIOS interferometric measurement systems for calibration and control of nanoscale movements.
The new metrology product line will include single double and triple beam interferometers for length measurements down to 0.1nm and angular measurements down to 0.01 arcsec. A vibrometer is also available for vibrational analysis.
Applications include semiconductor analysis, microscopy, materials analysis and microstructure measurement.
piezosystem jena is now the exclusive distributer for SIOS measurement systems in the US.
For further question please contact us: usa@piezojena.com
SIOS-interferometer & vibrometer
- vibrometer laserinterferometric
- miniature plane-mirror interferometer
- miniature double plane mirror interferometer
- triple-beam plane-mirror interferometer
- miniature retroreflector interferometer
- nano positioning and nano measuring machine
- gauge block calibration system
- laser-interferometric gauging probe
- He-Ne laser stabilized

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